Handbook of Optical Metrology: Principles and Applications, - download pdf or read online

By Toru Yoshizawa

ISBN-10: 1138893633

ISBN-13: 9781138893634

ISBN-10: 1466573597

ISBN-13: 9781466573598


Handbook of Optical Metrology: ideas and Applications starts off via discussing key ideas and strategies ahead of exploring useful purposes of optical metrology. Designed to supply newbies with an creation to optical metrology with out sacrificing educational rigor, this entire text:



  • Covers basics of sunshine assets, lenses, prisms, and mirrors, in addition to optoelectronic sensors, optical units, and optomechanical elements

  • Addresses interferometry, holography, and speckle equipment and applications

  • Explains Moiré metrology and the optical heterodyne size method

  • Delves into the specifics of diffraction, scattering, polarization, and near-field optics

  • Considers purposes for measuring size and dimension, displacement, straightness and parallelism, flatness, and 3-dimensional shapes

This new Second Edition is absolutely revised to mirror the newest advancements. it is also 4 new chapters—nearly a hundred pages—on optical coherence tomography for commercial purposes, interference microscopy for floor constitution research, noncontact dimensional and profile metrology via video dimension, and optical metrology in production technology.

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Handbook of Optical Metrology: Principles and Applications, Second Edition by Toru Yoshizawa


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